Structured illumination apparatus, structured illumination microscopy, and structured illumination method

ABSTRACT

A structured illumination apparatus includes a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; an illuminating optical system making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and a controlling unit controlling a contrast of the interference fringes by modulating a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.

CROSS-REFERENCE TO THE RELATED APPLICATION

This application is a continuation application of International Application PCT/JP2012/004548, filed Jul. 13, 2012, designating the U.S., and claims the benefit of priority from Japanese Patent Application No. 2011-156456, filed on Jul. 15, 2011, the entire contents of which are incorporated herein by reference.

BACKGROUND

1. Field

The present application relates to a structured illumination apparatus, a structured illumination microscopy, and a structured illumination method.

2. Description of the Related Art

Patent Document 1 (U.S. Pat. No. 6,239,909) discloses an example in which a structured illumination microscopy is applied to a fluorescent observation. In a method of Patent Document 1, a light flux that exits from a coherent light source is split into two light fluxes by a diffraction grating, and those two light fluxes are individually focused on mutually different positions on a pupil plane of an objective lens. The two light fluxes exit from the objective lens as collimated light fluxes with different angles, and overlap each other on a sample plane to form interference fringes. Accordingly, the sample plane is subjected to structured illumination. Further, in the method of Patent Document 1, images of sample images are obtained using different phase of the structured illumination, and separated for frequency components and demodulated from the plurality of obtained images by the method described in the U.S. Patent Document 1.

Note that as a method of shifting the phase of structured illumination in steps, there are a method in which a wedge-shaped prism is inserted into one of the above-described two light fluxes and moved in steps in a direction perpendicular to an optical axis, a method in which a diffraction grating is moved in steps in a direction perpendicular to a grid line, a method in which a sample is moved in steps in a pitch direction of structured illumination, and the like.

However, when an optical element is moved in steps, a certain period of time is required for moving and stopping of optical element at an appropriate position, so that it is difficult to reduce a period of time to take all of the required images. Particularly, when a sample to obtain the images is a live organism specimen, there is a chance that a structure of the sample changes every second, so that the obtainment of images should be performed as fast as possible.

Further, as an application of technique utilizing the interference fringes (Patent Document 1), a technique of turning a beam that contributes to the interference fringe into three beams (Non-Patent Document 1: Mats G. L. Gustafsson et al., “Doubling the lateral resolution of wide-field fluorescence microscopy using structured illumination”, Proceedings of the SPIE—The International Society for Optical Engineering, Vol. 3919, pp. 141-150, 2000) has also been proposed for achieving a super-resolution effect in both of an in-plane direction and a depth direction of a sample. This is because, if three beams are used, a stripe pattern of structured illumination can be generated not only in the in-plane direction but also in the depth direction. However, in that case, the number of images required for the aforementioned separating calculation is increased, so that it can be considered that the necessity of increasing the speed of obtaining images is particularly high.

SUMMARY

The present application has been made to solve the problems of the related art described above. A proposition of the present application is to provide a structured illumination apparatus, a structured illumination microscopy, and a structured illumination method capable of performing a high-speed switching of structured pattern, and expanding a structuring direction.

One aspect of a structured illumination apparatus of the present embodiment includes a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; an illuminating optical system making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and a controlling unit controlling a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.

A structured illumination microscopy of the present embodiment includes the structured illumination apparatus of the present embodiment; and an image processing unit making a super-resolved image of an observational object using images obtained by a detector that detects an observational light from the observational object illuminated by the structured illumination apparatus with a plurality of different phase of the sonic standing wave.

One aspect of a structured illumination method of the present embodiment includes a light modulating step preparing a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a driving step generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; an illuminating step making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and a controlling step controlling a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a configuration diagram of a structured illumination microscopy system of an embodiment, FIG. 1B is an enlarged diagram of a periphery of a mask 5A, FIG. 1C is a schematic diagram in which the mask 5A is seen from an optical axis direction, and FIG. 1D illustrates a modified example of the mask 5A.

FIG. 2(A) is a schematic diagram illustrating a pattern of ultrasonic standing wave generated in an ultrasonic wave propagation path R of an ultrasonic wave spatial light modulator 3, FIG. 2(B) is a schematic diagram illustrating a pattern of two-beam structured illumination (arrangement of bright part and dark part) corresponding to the pattern. FIG. 2(C) to FIG. 2(E) are diagrams explaining a change in a number of fringe when a number of wave is changed.

FIG. 3(A) is a diagram explaining a relation between a length L and a distance D, FIG. 3(B) is a conceptual diagram of structured illumination S′ corresponding to a spot S, and FIG. 3(C) is a diagram explaining a deviation of a number of fringe of the structured illumination S′.

FIG. 4 is a configuration diagram of the ultrasonic wave spatial light modulator 3.

FIG. 5 is a diagram explaining a basic configuration of a controlling device 19 (driving circuit 19A).

FIG. 6 is an operational flow chart of image processing in a two-dimensional mode.

FIG. 7 is a diagram illustrating a time-variation of a refractive index distribution of an ultrasonic wave propagation path.

FIG. 8(A) is a schematic diagram illustrating a pattern of ultrasonic standing wave, and FIG. 8(B) is a schematic diagram illustrating a pattern of two-beam structured illumination.

FIG. 9(A) is a schematic diagram illustrating a pattern of ultrasonic standing wave, and FIG. 9(B) is a schematic diagram illustrating a pattern of three-beam structured illumination.

FIG. 10 is a diagram explaining a configuration of a controlling device 19 related to a three-dimensional mode.

FIG. 11A is a diagram illustrating a waveform of sine signal output from a first output terminal, and FIG. 11B is a diagram illustrating a waveform of pulse signal output from a second output terminal.

FIG. 12A to FIG. 12C are diagrams each comparing a waveform of time-variation of a refractive index of antinode a of an ultrasonic standing wave (solid line) and a waveform of time-variation of an amount of phase modulation of 0th-order diffracted light (dotted line). FIG. 12A illustrates a waveform when a phase difference ΔΨ of these two waveforms is a product of π/2 multiplied by an even number, FIG. 12B illustrates a waveform when the phase difference ΔΨ of the two waveforms is not a product of π/2 multiplied by an odd number, and FIG. 12C illustrates a waveform when the phase difference ΔΨ of the two waveforms is a product of π/2 multiplied by an odd number.

FIG. 13(A) illustrates a waveform of time-variation of a refractive index of antinode a of a standing wave in FIG. 7, FIG. 13(B) illustrates a waveform of time-variation of an amount of phase modulation of 0th-order diffracted light, and FIG. 13(C) illustrates a waveform indicating a charge storage period (note that a case where N=3 is illustrated).

FIG. 14 illustrates an example of phase modulation pattern when a target of phase modulation is 0th-order diffracted light.

FIG. 15 illustrates an example of phase modulation pattern when a target of phase modulation is ±first-order diffracted lights.

FIG. 16A and FIG. 16B illustrate examples of mask when a target of phase modulation is ±first-order diffracted lights.

FIG. 17 is a diagram explaining a phase shift pitch under a setting of D:L=1:6.

FIG. 18 illustrates a modified example of the ultrasonic wave spatial light modulator 3.

FIG. 19 illustrates another example of the mask when a target of phase modulation is ±first-order diffracted lights.

FIG. 20 illustrates an example of phase modulation pattern when a target of phase modulation is ±first-order diffracted lights.

DETAILED DESCRIPTION OF THE EMBODIMENT

Hereinafter, a structured illumination microscopy system will be described as an embodiment of the present invention.

FIG. 1A is a configuration diagram of a structured illumination microscopy system of the present embodiment.

As illustrated in FIG. 1A, in the present system, there are disposed a coherent light source 1, a collector lens 2, an ultrasonic wave spatial light modulator 3, a lens 4, a mask 5A, a lens 6, a field stop 5B, a lens 7, an excitation filter 8 a, a dichroic mirror 8, a fluorescence filter 8 b, a tube lens 11, an imaging device (CCD camera or the like) 12, a controlling device 19, an image storage/processing unit (computer or the like) 13, an image display device 14, and an objective lens 9. Note that a reference numeral 10 in FIG. 1A denotes a specimen placed on a not-illustrated stage, and in this case, it is assumed that the specimen is previously fluorescent-stained.

The coherent light source 1 radiates light having a wavelength which is the same as an excitation wavelength of the specimen 10. The light exited from the coherent light source 1 is converted into collimated light by the collector lens 2 to be incident on the ultrasonic wave spatial light modulator 3.

The ultrasonic wave spatial light modulator 3 has an ultrasonic wave propagation path R propagating an ultrasonic wave in a direction perpendicular to an optical axis, and gives, by generating a planar standing wave of ultrasonic wave (referred to as “ultrasonic standing wave”, hereinafter) in the ultrasonic wave propagation path R, a refractive index distribution of sinusoidal shape to the ultrasonic wave propagation path R. Such an ultrasonic wave spatial light modulator 3 operates as a phase type diffraction grating with respect to the incident light, and branches the light into diffracted lights of respective orders (0th-order diffracted light, + first-order diffracted light, − first-order diffracted light, + second-order diffracted light, − second-order diffracted light, . . . ). Note that in FIG. 1A, only 0th-order diffracted light and ± first-order diffracted lights are illustrated as a representative. In FIG. 1A and FIG. 1B, a solid line indicates the 0th-order diffracted light, and a dotted line indicates the ± first-order diffracted lights. The diffracted lights of respective orders exited from the ultrasonic wave spatial light modulator 3 pass through the lens 4, and then form a pupil conjugate plane.

Here, the pupil conjugate plane indicates a focal position of the lens 4 (rear focal position), and a position conjugated with a pupil plane P of the later-described objective lens 9 (position at which the ± first-order diffracted lights are condensed) via the lens 7 and the lens 6 (note that a position determined by a person skilled in the art by taking the design requirements such as aberration, vignetting and the like of the objective lens 9 and the lenses 6 and 7, also falls into the concept of “conjugate position”).

The mask 5A is disposed in the pupil conjugate plane, and has a function of blocking higher-order diffracted light of second-order or higher, out of diffracted lights of respective orders which are incident on the pupil conjugate plane. Further, as illustrated in FIG. 1C in an enlarged manner, the mask 5A is obtained by forming an optical phase modulator 5C and a corrective block 5C′ on a substrate. Out of the above, a position at which the optical phase modulator 5C is disposed corresponds to an area, on the pupil conjugate plane, on which the 0th-order diffracted light is incident, and a position at which the corrective block 5C′ is disposed corresponds to each of areas, on the pupil conjugate plane, on which ± first-order diffracted lights are incident. FIG. 1C illustrates an example of disposition relationship of the optical phase modulator 5C and the corrective block 5C′ (note that FIG. 1C is a schematic diagram, and an illustration of electrode, wiring and the like is omitted).

The optical phase modulator 5C is an optical phase modulator that modulates a phase of incident light (0th-order diffracted light, in this case) in a time direction in a modulation width π. To the optical phase modulator 5C, an EO modulator (electro-optical modulator) that utilizes the Kerr effect, an EO modulator that utilizes the Pockels effect, an AO modulator (acousto-optical modulator) or the like can be applied. The optical phase modulator 5C is controlled by the controlling device 19.

The corrective block 5C′ is a phase block for making a phase difference between 0th-order diffracted light passed through the mask 5A and ± first-order diffracted lights passed through the mask 5A when an amount of phase modulation of the optical phase modulator 5C is zero (when no voltage is applied to the optical phase modulator 5C) to be zero.

Here, although details will be described later, a branching direction of diffracted light branched by the ultrasonic wave spatial light modulator 3 can be switched. In this case, an incident area of 0th-order diffracted light on the pupil conjugate plane is unchanged, but, an incident area of ± first-order diffracted lights on the pupil conjugate plane moves around an optical axis. Accordingly, a position at which the corrective block 5C′ is disposed is desirably set to an entire area on which ± first-order diffracted lights may be incident, as illustrated in FIG. 1D, for example. In the description hereinbelow, it is assumed that the position at which the corrective block 5C′ is disposed is set to the entire area on which the ± first-order diffracted lights may be incident, as illustrated in FIG. 1D.

Further, in this case, it is set that the optical phase modulator 5C also has a function of blocking the incident light (0th-order diffracted light, in this case) according to need (light-blocking function), in addition to the function of modulating the phase of incident light (0th-order diffracted light, in this case) (phase-modulating function), for performing switching between a two-dimensional mode and a three-dimensional mode to be described later. Note that it is also possible to additionally provide a shutter that opens/closes an independent optical path of 0th-order diffracted light, instead of providing the light-blocking function to the optical phase modulator 5C, but, in the description hereinbelow, it is assumed that the light-blocking function is provided to the optical phase modulator 5C.

Incidentally, FIG. 1A illustrates a state where the light-blocking function of the optical phase modulator 5C is turned on, and FIG. 1B illustrates a state where the light-blocking function of the optical phase modulator 5C is turned off.

First, explanation will be made by assuming the state where the light-blocking function of the optical phase modulator 5C is turned on. In this case, diffracted lights that pass through the mask 5A are only the ± first-order diffracted lights, as illustrated in FIG. 1A.

A conjugate plane of the specimen 10 is formed by the ± first-order diffracted lights passed through the mask 5A via the lens 6. In the vicinity of the conjugate plane of the specimen 10, the field stop 5B is disposed, and the field stop 5B has a function of controlling a size of illuminated area (observational area) on the specimen 10.

The ± first-order diffracted lights passed through the field stop 5B pass through the lens 7, and after that, the lights are incident on the dichroic mirror 8 via the excitation filter 8 a, and reflected by the dichroic mirror 8. The ± first-order diffracted lights reflected by the dichroic mirror 8 respectively form spots at mutually different positions on the pupil plane P of the objective lens 9. Note that the formation positions of the two spots formed by the ±first-order diffracted lights on the pupil plane P are at approximately an outermost peripheral portion of the pupil plane P, and positions symmetric to each other with respect to an optical axis of the objective lens 9. In this case, the ± first-order diffracted lights exited from the tip of the objective lens 9 illuminate the specimen 10 from mutually opposing directions at an angle corresponding to NA of the objective lens 9. Note that when a pitch of diffraction grating is changed just a little as a result of slightly changing a frequency of applied voltage, as will be described later, the positions of the two spots are extremely slightly changed.

Here, the ± first-order diffracted lights irradiated to the specimen 10 are mutually coherent lights exited from the coherent light source 1. Accordingly, by the ± first-order diffracted lights, striped interference fringes with a uniform fringe pitch are projected onto the specimen 10. Specifically, an illumination pattern with respect to the specimen 10 corresponds to an illumination pattern having a fringe structure. The illumination with the illumination pattern having the fringe structure as above is structured illumination. In the fluorescent area (fluorescent-stained area described above) of the specimen 10 subjected to the structured illumination, a fluorescent material is excited to generate fluorescence.

Note that only two beams of the ± first-order diffracted lights are used to realize the structured illumination, so that the illumination is structured in an in-plane direction of the specimen 10, but, it is not structured in a depth direction (optical axis direction) of the specimen 10. Hereinafter, such structured illumination is referred to as “two-beam structured illumination”.

When the two-beam structured illumination is employed, a moiré fringe corresponding to a difference between a spatial frequency of the two-beam structured illumination and a spatial frequency of the fluorescent area (corresponding to a spatial frequency of the specimen) appears on the specimen 10. On the moiré fringe, a spatial frequency of the structure of the fluorescent area is modulated to be shifted to a spatial frequency that is lower than the actual spatial frequency. Therefore, with the use of the two-beam structured illumination, even a fluorescence that exhibits a high component of spatial frequency in the structure of the fluorescent area, namely, a fluorescence emitted at a large angle that exceeds a resolution limit of the objective lens 9, can be incident on the objective lens 9.

The fluorescence that is emitted from the specimen 10 and incident on the objective lens 9 is converted into collimated light by the objective lens 9, and then incident on the dichroic mirror 8. The fluorescence transmits through the dichroic mirror 8, and then passes through the tube lens 11 via the fluorescence filter 8 b, to thereby form a fluorescent image of the specimen 10 on an imaging plane of the imaging device 12. Note that this fluorescent image includes not only structural information of the fluorescent area of the specimen 10 but also structural information of the two-beam structured illumination, and in this fluorescent image, the spatial frequency of the structure of the fluorescent area of the specimen 10 is still being modulated (namely, the spatial frequency is still being shifted to the spatial frequency that is lower than the actual spatial frequency).

The controlling device 19 controls the ultrasonic standing wave generated in the ultrasonic wave propagation path R of the ultrasonic wave spatial light modulator 3, to thereby change patterns of the two-beam structured illumination (details will be described later). Further, the controlling device 19 drives the imaging device 12 when the patterns of the two-beam structured illumination are under respective states to obtain a plurality of types of image data, and sequentially sends the plurality of image data to the image storage/processing unit 13. Note that a charge storage time per one frame in the imaging device 12 is, for example, 1/30 seconds, 1/60 seconds or the like.

The image storage/processing unit 13 performs separating calculation from the plurality of image data which are taken therein, to thereby obtain image data as a result of separated frequency information of the structure of the specimen. Further, the image storage/processing unit 13 performs demodulating calculation with the use of multiplication with a demodulation coefficient on the image data as a result of separated frequency information to obtain demodulated image data as a result of returning the spatial frequency of the structural information of the fluorescent area to the actual spatial frequency, and sends the demodulated image data to the image display device 14. Note that for concrete calculation, a method disclosed in, for example, U.S. Pat. No. 8,115,806 can be employed. Accordingly, a resolved image that exceeds the resolution limit of the objective lens 9 (two-dimensional super-resolved image) is displayed on the image display device 14.

FIG. 2(A) is a schematic diagram illustrating a pattern of ultrasonic standing wave generated in the ultrasonic wave propagation path R, and FIG. 2(B) is a schematic diagram illustrating a pattern of two-beam structured illumination (arrangement of bright part and dark part) corresponding to the pattern (note that actually, only a pattern of area through which an effective light flux passes, out of the pattern of the ultrasonic standing wave, contributes to the pattern of the two-beam structured illumination). Further, in FIG. 2(A), there are two waves in ultrasonic standing wave, which is smaller than the actual number, for easier understanding of the explanation.

As illustrated in FIG. 2(A), when the number of wave of the ultrasonic standing wave (the number of wave is counted as one when the phase is shifted by 2π) is “2”, a number of fringe (number of bright part or dark part) of the two-beam structured illumination formed by the interference of ± first-order diffracted lights becomes “4”, as illustrated in FIG. 2(B). Specifically, the number of fringe of the two-beam structured illumination becomes twice the number of wave of the ultrasonic standing wave corresponding to the number of fringe.

Further, when the number of wave of the ultrasonic standing wave is changed, by ½, in three ways such as 2, (2+½), and 3 (namely, when the wavelength of the ultrasonic standing wave is changed), as illustrated in FIG. 2(C), FIG. 2(D), and FIG. 2(E), for example, the number of fringe of the two-beam structured illumination corresponding to the number of wave is changed, by one, in three ways such as 4, 5, and 6.

Here, if attention is focused only on a portion deviated by ½ from one end of the ultrasonic wave propagation path R, as indicated by a white arrow mark in FIG. 2, the phase of the two-beam structured illumination corresponding to the focused portion is shifted, by “π”, in three ways.

Further, if attention is focused only on portions each deviated by ⅓ from one end of the ultrasonic wave propagation path R, as indicated by black arrow marks in FIG. 2, the phase of the two-beam structured illumination corresponding to each of the focused portions is shifted, by “2π/3”, in three ways.

Accordingly, if an incident area of light with respect to the ultrasonic wave propagation path R is tentatively limited only to the position indicated by the white arrow mark, the phase of the two-beam structured illumination can be shifted by “n”, only by changing the number of wave of the ultrasonic standing wave by ½.

Further, if the incident area of light with respect to the ultrasonic wave propagation path R is tentatively limited only to the positions indicated by the black arrow marks, the phase of the two-beam structured illumination can be shifted by “2π/3”, only by changing the number of wave of the ultrasonic standing wave by ½.

Here, the aforementioned separating calculation for separated frequency information of the specimen requires at least three pieces of image data with different phases of the two-beam structured illumination. In that case, it is only required to set an amount of phase shift per one step of the two-beam structured illumination to 2π/3, for example.

In order to generate the two-dimensional super-resolved image by the two-beam structured illumination, a distance D from a center of spot (effective diameter) S of light which is incident on the ultrasonic wave propagation path R to one end of the ultrasonic wave propagation path R, may be set to one-third a length L in a propagation direction of the ultrasonic wave propagation path R (D=L/3), as illustrated in FIG. 3(A).

However, when the number of wave of the ultrasonic standing wave generated in the ultrasonic wave propagation path R is changed by ½, the number of wave of the ultrasonic standing wave generated in the inside of the spot S is also deviated a little, so that the number of fringe of two-beam structured illumination S′ corresponding to the spot S is also deviated a little, as illustrated in FIG. 3(B) (note that the pattern of wave and the pattern of fringe illustrated in FIG. 3 are illustrated in a schematic manner, and thus the number of wave and the number of fringe do not always coincide with the actual numbers).

Therefore, the length L of the ultrasonic wave propagation path R is set to be large enough, compared to a diameter φ of the spot S, so that the deviation of the number of fringe of the two-beam structured illumination S′ can be regarded as approximately zero.

Concretely, the length L of the ultrasonic wave propagation path R and the diameter φ of the spot S are set to satisfy a relation of φ/L<δ, with respect to an acceptable amount δ of the deviation of the number of fringe of the two-beam structured illumination S′. For example, if the deviation of the number of fringe of the two-beam structured illumination S′ is required to be suppressed to the number of 0.15 or less, the relational expression becomes φ/L≦0.15.

In the present embodiment, if the number of fringe is controlled at an appropriate frequency by setting that the diameter φ of the spot S is 4 mm and assuming that the length L of the ultrasonic wave propagation path R is 30 mm, the deviation of fringes at each of both ends of the two-beam structured illumination S′ becomes one corresponding to about the number of 0.068, as illustrated in FIG. 3(C). For this reason, the deviation of the number of fringe in the entire area of the two-beam structured illumination S′ can be suppressed to about the number of 0.068+0.068=0.13.

Note that in FIG. 3(C), a dotted line indicates an ideal pattern of the two-beam structured illumination S′ (pattern when the deviation of the number of fringe is zero), a solid line indicates an actual pattern of the two-beam structured illumination S′, and a deviation of the both is illustrated in an exaggerated manner for easier understanding.

Note that in the above explanation, the diameter φ of the spot S satisfies the relation of φ/L<δ on the ultrasonic wave propagation path R of the ultrasonic wave spatial light modulator 3, but, it does not always have to satisfy the relation. For example, when the ±first-order diffracted lights exited from the ultrasonic wave spatial light modulator 3 are narrowed by the field stop 5B, the length L of the ultrasonic wave propagation path R, a diameter φ′ of illuminated area (observational area, field area) on the specimen plane, and an optical power m from the specimen plane to the ultrasonic wave spatial light modulator 3, are only required to be set to satisfy a relation of φ′×m/L<δ, with respect to the acceptable amount δ of the deviation of the number of fringe of the two-beam structured illumination S′.

FIG. 4 are diagrams specifically explaining a configuration of the ultrasonic wave spatial light modulator 3. FIG. 4(A) is a diagram in which the ultrasonic wave spatial light modulator 3 is seen from the front (optical axis direction), and FIG. 4(B) is a diagram in which the ultrasonic wave spatial light modulator 3 is seen from the side (direction perpendicular to the optical axis).

As illustrated in FIG. 4, the ultrasonic wave spatial light modulator 3 includes an acousto-optical medium 15, and the acousto-optical medium 15 is set to have a prismatic columnar shape having three pairs of mutually opposing parallel coupled side faces. Three transducers 18 a, 18 b, and 18 c are individually provided on the three pairs of coupled side faces, on one side of each of the coupled side faces, and accordingly, three ultrasonic wave propagation paths are formed in one acousto-optical medium 15. Hereinafter, the ultrasonic wave propagation path formed between a formation face of the transducer 18 a and a side face 15 a opposing the formation face is set to an “ultrasonic wave propagation path Ra”, the ultrasonic wave propagation path formed between a formation face of the transducer 18 b and a side face 15 b opposing the formation face is set to an “ultrasonic wave propagation path Rb”, and the ultrasonic wave propagation path formed between a formation face of the transducer 18 c and a side face 15 c corresponding to the formation face is set to an “ultrasonic wave propagation path Rc”.

Note that a material of the acousto-optical medium 15 is, for example, a quartz glass, a tellurite glass, a dense flint glass, a flint glass or the like, and the three pairs of coupled side faces and two bottom faces of the acousto-optical medium are respectively polished with sufficient precision.

Here, it is assumed that lengths L of the respective three ultrasonic wave propagation paths Ra, Rb, and Rc are common (L=30 mm). Further, the length L satisfies the aforementioned condition with respect to the diameter φ of the spot S described above. Further, the three ultrasonic wave propagation paths Ra, Rb, and Rc intersect at angles different by 60° from each other, at a position separated by L/3 from one end of each of the paths. At a position of the intersection, a center of the above-described spot S is positioned.

The transducer 18 a is an ultrasonic wave transducer having a piezoelectric body 16 a and two electrodes 17 a individually formed on upper and lower faces of the piezoelectric body 16 a, and is joined to one side face of the acousto-optical medium 15 via the electrode 17 a being one of the two electrodes 17 a. When an AC voltage of high frequency with sinusoidal shape is applied between the two electrodes 17 a of the transducer 18 a, the piezoelectric body 16 a vibrates in a thickness direction, resulting in that a planar ultrasonic wave reciprocates in the ultrasonic wave propagation path Ra. When the frequency of AC voltage applied between the two electrodes 17 a is set to a specific frequency (appropriate frequency), the ultrasonic wave becomes a standing wave, so that a distribution of sinusoidal shape is given to a refractive index of the ultrasonic wave propagation path, over a propagation direction of the ultrasonic wave. Accordingly, the ultrasonic wave propagation path Ra becomes a phase type diffraction grating having a phase grating perpendicular to the propagation direction of the ultrasonic wave. Hereinafter, the propagation direction in the ultrasonic wave propagation path Ra is referred to as a “first direction”.

Further, the transducer 18 b, which also has the same configuration as that of the transducer 18 a, has a piezoelectric body 16 b and two electrodes 17 b individually formed on upper and lower faces of the piezoelectric body 16 b, and is joined to one side face of the acousto-optical medium 15 via the electrode 17 b being one of the two electrodes 17 b.

Therefore, when an AC voltage of appropriate frequency is applied between the two electrodes 17 b of the transducer 18 b, a planar ultrasonic wave propagates in the ultrasonic wave propagation path Rb, so that the ultrasonic wave propagation path Rb becomes a phase type diffraction grating having a phase grating perpendicular to the propagation direction of the ultrasonic wave. Hereinafter, the propagation direction in the ultrasonic wave propagation path Rb is referred to as a “second direction”. This second direction makes an angle of 60° with the first direction.

Further, the transducer 18 c, which also has the same configuration as that of the transducer 18 a, has a piezoelectric body 16 c and two electrodes 17 c individually formed on upper and lower faces of the piezoelectric body 16 c, and is joined to one side face of the acousto-optical medium 15 via the electrode 17 c being one of the two electrodes 17 c.

Therefore, when an AC voltage of appropriate frequency is applied between the two electrodes 17 c of the transducer 18 c, a planar ultrasonic wave propagates in the ultrasonic wave propagation path Rc, so that the ultrasonic wave propagation path Rc becomes a phase type diffraction grating having a phase grating perpendicular to the propagation direction of the ultrasonic wave. Hereinafter, the propagation direction in the ultrasonic wave propagation path Rc is referred to as a “third direction”. This third direction makes an angle of −60° with the first direction.

FIG. 5 is a diagram explaining a basic configuration of the controlling device 19. A reference numeral 19A in FIG. 5 denotes a driving circuit 19A included in the controlling device 19, and the driving circuit 19A includes a high-frequency AC power source 19A-1 and a selector switch 19A-2.

The high-frequency AC power source 19A-1 generates an AC voltage to be supplied to the ultrasonic wave spatial light modulator 3. A frequency of the AC voltage is controlled to an appropriate frequency (any value within a range of several tens of MHz to 100 MHz, for example), by the controlling device 19.

Therefore, when the amount of phase shift of the two-beam structured illumination S′ is changed in steps, in three ways of −2π/3, 0, and +2π/3, for example, the controlling device may switch the frequency of the AC voltage among three ways of different appropriate frequencies f⁻¹, f₀, and f₊₁.

For example, the appropriate frequency f₀ is set to an appropriate frequency (80 MHz) for generating ultrasonic standing waves whose number is 100 (the number of fringe of the two-beam structured illumination corresponding thereto is 200) in the ultrasonic wave propagation paths Ra, Rb, and Rc each having the length L of 30 mm. With the use of the appropriate frequency f₀, the amount of phase shift of the two-beam structured illumination S′ is zero.

In this case, the appropriate frequency f⁻¹ becomes an appropriate frequency (79.946 MHz) for generating ultrasonic standing waves whose number is (100−½) (the number of fringe of the two-beam structured illumination corresponding thereto is 199) in the ultrasonic wave propagation paths Ra, Rb, and Rc each having the length L of 30 mm. With the use of the appropriate frequency f⁻¹, the amount of phase shift of the two-beam structured illumination S′ becomes −2π/3.

Further, the appropriate frequency f₊₁ becomes an appropriate frequency (80.054 MHz) for generating ultrasonic standing waves whose number is (100+½) (the number of fringe of the two-beam structured illumination corresponding thereto is 201) in the ultrasonic wave propagation paths Ra, Rb, and Rc each having the length L of 30 mm. With the use of the appropriate frequency f₊₁, the amount of phase shift of the two-beam structured illumination S′ becomes +2π/3.

The selector switch 19A-2 is disposed between the high-frequency AC power source 19A-1 and the ultrasonic wave spatial light modulator 3, and can switch a connection destination on the side of the ultrasonic wave spatial light modulator 3, among the three transducers 18 a, 18 b, and 18 c of the ultrasonic wave spatial light modulator 3. The connection destination of the switch 19A-2 is appropriately switched by the controlling device 19.

When the connection destination of the selector switch 19A-2 is on the side of the transducer 18 a, the AC voltage is applied between the two electrodes of the transducer 18 a, so that only the ultrasonic wave propagation path Ra among the three ultrasonic wave propagation paths Ra, Rb, and Rc, becomes effective.

Further, when the connection destination of the selector switch 19A-2 is on the side of the transducer 18 b, the AC voltage is applied between the two electrodes of the transducer 18 b, so that only the ultrasonic wave propagation path Rb among the three ultrasonic wave propagation paths Ra, Rb, and Rc, becomes effective.

Further, when the connection destination of the selector switch 19A-2 is on the side of the transducer 18 c, the AC voltage is applied between the two electrodes of the transducer 18 c, so that only the ultrasonic wave propagation path Rc among the three ultrasonic wave propagation paths Ra, Rb, and Rc, becomes effective.

As above, when the effective ultrasonic wave propagation path is switched among the three ultrasonic wave propagation paths Ra, Rb, and Rc, the direction of two-beam structured illumination S′ can be switched among a direction corresponding to the first direction, a direction corresponding to the second direction, and a direction corresponding to the third direction.

Accordingly, by appropriately driving the above-described ultrasonic wave spatial light modulator 3 and controlling device 19, it is possible to generate a detailed two-dimensional super-resolved image. Concrete explanation will be made hereinbelow.

FIG. 6 is an operational flow chart of the controlling device. Hereinafter, respective steps will be described in order.

Step S11: The controlling device sets the connection destination of the selector switch 19A-2 to a first transducer (transducer 18 a) side, to thereby set the direction of two-beam structured illumination S′ to the direction corresponding to the first direction.

Step S12: The controlling device sets the frequency of AC voltage generated by the high-frequency AC power source 19A-1 to the appropriate frequency f⁻¹, to thereby set the amount of phase shift of the two-beam structured illumination S′ to −2π/3.

Step S13: The controlling device drives the imaging device 12 under this state to obtain image data I⁻¹.

Step S14: The controlling device sets the frequency of AC voltage generated by the high-frequency AC power source 19A-1 to the appropriate frequency f₀, to thereby set the amount of phase shift of the two-beam structured illumination S′ to zero.

Step S15: The controlling device drives the imaging device 12 under this state to obtain image data I₀.

Step S16: The controlling device sets the frequency of AC voltage generated by the high-frequency AC power source 19A-1 to the appropriate frequency f₊₁, to thereby set the amount of phase shift of the two-beam structured illumination S′ to +2π/3.

Step S17: The controlling device drives the imaging device 12 under this state to obtain image data I₊₁.

Step S18: The controlling device judges whether or not the setting of direction of the two-beam structured illumination S′ to all of the above-described three directions is completed, in which when the setting is not completed, the process proceeds to step S19, and when the setting is completed, the flow is terminated.

Step S19: The controlling device switches the direction of two-beam structured illumination S′ by switching the connection destination of the selector switch 19A-2, and then the process proceeds to step S12.

According to the above-described flow, pieces of image data Ia⁻¹, Ia₀, and Ia₊₁ regarding the first direction, pieces of image data Ib⁻¹, Ib₀, and Ib₊₁ regarding the second direction, and pieces of image data Ic⁻¹, Ic₀, and Ic₊₁ regarding the third direction are obtained. These pieces of image data are taken into the image storage/processing unit 13.

The image storage/processing unit 13 obtains demodulated image data Ia′ along the first direction from the three pieces of image data Ia⁻¹, Ia₀, and Ia₊₁ regarding the first direction, obtains demodulated image data Ib′ along the second direction from the three pieces of image data Ib⁻¹, Ib₀, and Ib₊₁ regarding the second direction, and obtains demodulated image data Ic′ along the third direction from the three pieces of image data Ic⁻¹, Ic₀, and Ic⁻⁰ along the third direction. After that, the image storage/processing unit 13 combines the three pieces of demodulated image data Ia′, Ib′, and Ic′ on a wave number space, then returns the resultant to the real space again to obtain image data I of super-resolved image along the first direction, the second direction, and the third direction, and sends the image data I to the image display device 14. The super-resolved image corresponds to a two-dimensional super-resolved image along the three directions in the in-plane direction of the specimen 10.

As described above, in the present system, by turning on the light-blocking function of the optical phase modulator 5C, it is possible to realize the structured illumination formed of the ± first-order diffracted lights (specifically, the two-beam structured illumination).

Accordingly, in the present system, by obtaining the plurality of pieces of image data by switching the patterns of the two-beam structured illumination, it becomes possible to generate the super-resolved image along the in-plane direction of the specimen 10 (specifically, the two-dimensional super-resolved image). Hereinafter, a mode of the present system for generating the two-dimensional super-resolved image is referred to as a “two-dimensional mode”.

Further, in the present system, by turning off the light-blocking function of the optical phase modulator 5C, it is possible to realize structured illumination formed of the ±first-order diffracted lights and the 0th-order diffracted light (specifically, three-beam structured illumination).

Accordingly, in the present system, by obtaining a plurality of pieces of image data by switching patterns of the three-beam structured illumination, it becomes possible to generate a super-resolved image along the in-plane direction and the optical axis direction of the specimen 10 (specifically, a three-dimensional super-resolved image). Hereinafter, a mode of the present system for generating the three-dimensional super-resolved image is referred to as a “three-dimensional mode”.

Hereinafter, the three-dimensional mode will be described in detail. Note that here, only a point of difference between the three-dimensional mode and the above-described two-dimensional mode will be described.

The three-beam structured illumination projected onto the specimen 10 in the three-dimensional mode is formed of three beams of the ± first-order diffracted lights and the 0th-order diffracted light, so that the illumination is structured not only in the in-plane direction of the specimen 10 but also in the optical axis direction of the specimen 10. Besides, a pattern of the three-beam structured illumination in the in-plane of the specimen 10 is slightly different from the pattern of the two-beam structured illumination in the in-plane of the specimen 10. This point will be described in detail hereinafter.

First, the ultrasonic standing wave is generated in the ultrasonic wave spatial light modulator 3 as described above, and an instantaneous value of a pattern of the ultrasonic standing wave (=refractive index distribution of ultrasonic wave propagation path) is time-varied, from an upper direction to a lower direction in FIG. 7.

In FIG. 7, a time t at a moment at which the refractive index distribution of the ultrasonic wave propagation path becomes flat is set to t=0, and a time-variable pitch of the refractive index distribution is set to T. Incidentally, the pitch T corresponds to a reciprocal of a frequency of an AC voltage supplied to the ultrasonic wave spatial light modulator 3.

Hereinafter, a period of time of t=0 to T/2 is referred to as an “anterior half period of the refractive index variation”, and a period of time of t=T/2 to T is referred to as a “last half period of the refractive index variation”. Further, as indicated by a circle mark in FIG. 7, a portion in which the refractive index is not varied in the ultrasonic wave propagation path is referred as a “node”, and a portion in which the refractive index is varied is referred to as an “antinode”.

Here, if attention is focused on an antinode a in FIG. 7, it can be understood that a refractive index of the antinode a becomes higher than a refractive index of a node (the medium becomes dense) in the anterior half period of the refractive index variation, but, the refractive index of the antinode a becomes lower than the refractive index of the node (the medium becomes coarse) in the last half period of the refractive index variation.

On the other hand, if attention is focused on an antinode b adjacent to the antinode a in FIG. 7, it can be understood that a refractive index of the antinode b becomes lower than a refractive index of the node (the medium becomes coarse) in the anterior half period of the refractive index variation, but, the refractive index of the antinode b becomes higher than the refractive index of the node (the medium becomes dense) in the last half period of the refractive index variation.

Accordingly, if the ultrasonic wave spatial light modulator 3 is regarded as a phase type diffraction grating, a phase distribution of the phase type diffraction grating is reversed between the anterior half period and the last half period of the refractive index variation, as illustrated in FIG. 8(A) or FIG. 9(A). Specifically, the phase type diffraction grating is laterally shifted by a half grating pitch, between the anterior half period and the last half period of the refractive index variation.

Here, the two-beam structured illumination is formed of two-beam interference fringes, so that the number of fringe on the specimen 10 of the two-beam structured illumination is twice the number of grating of the phase type diffraction grating corresponding thereto, as schematically illustrated in FIG. 8(B). Accordingly, when the phase type diffraction grating is laterally shifted as illustrated in FIG. 8(A), the pattern of the two-beam structured illumination is changed as illustrated in FIG. 8(B). Specifically, in the two-beam structured illumination, a lateral displacement occurs by an amount corresponding to one pitch of fringe, between the anterior half period and the last half period of the refractive index variation.

Therefore, when the two-beam structured illumination is subjected to time integration over a period of time which is long enough compared to the pitch T, patterns at respective time points of the two-beam structured illumination are emphasized, resulting in that a high-contrast striped image is obtained. In this case, imaging of the two-beam structured illumination can be realized by the imaging device 12.

On the other hand, the three-beam structured illumination is formed of three-beam interference fringes, so that the number of fringe on the specimen 10 of the three-beam structured illumination becomes one time the number of grating of the phase type diffraction grating corresponding thereto, as schematically illustrated in FIG. 9(B). Accordingly, when the phase type diffraction grating is laterally shifted as illustrated in FIG. 9(A), the pattern of the three-beam structured illumination is changed as illustrated in FIG. 9(B). Specifically, in the three-beam structured illumination, a lateral displacement occurs by an amount corresponding to a half pitch of fringe, between the anterior half period and the last half period of the refractive index variation. This fact similarly applies to the respective aspects of the three-beam structured illumination with different positions of optical axis direction.

Therefore, when the three-beam structured illumination in this state is subjected to time integration over a period of time which is long enough compared to the pitch T, patterns at respective time points of the three-beam structured illumination cancel each other, resulting in that a uniform image with no contrast (gray image) is obtained. In this case, imaging of the three-beam structured illumination cannot be realized by the imaging device 12.

The reason why the optical phase modulator 5C (refer to FIG. 1A) is provided in the present system is for solving this problem (problem regarding the reduction in contrast) in the three-dimensional mode.

FIG. 10 is a diagram explaining a configuration of a controlling device 19 regarding the three-dimensional mode. As illustrated in FIG. 10, the controlling device 19 includes a power circuit 19C, a phase adjusting circuit 19D and the like, in addition to the above-described AC power source 19A-1 and selector switch 19A-2.

The power circuit 19C has a first output terminal and a second output terminal, in which the first output terminal is a terminal for supplying the aforementioned AC voltage (sine signal) to the side of the ultrasonic wave spatial light modulator 3, and the second output terminal is a terminal for supplying a pulse voltage (pulse signal) to the side of the optical phase modulator 5C.

The power circuit 19C constantly makes a frequency of the pulse signal output from the second output terminal coincide with a frequency of the sine signal output from the first output terminal, and when the frequency of the sine signal is switched by the controlling device 19, the frequency of the pulse signal is also switched in a similar manner. Note that a duty ratio (ON period/pulse period) of the pulse signal is set to a previously determined ratio (which is set to ½, in this case), and is unchanged without depending on the frequency of the pulse signal.

The phase adjusting circuit 19D is interposed between the power circuit 19C and the optical phase modulator 5C, and adjusts, in accordance with an instruction from the controlling device 19, a phase relationship between the sine signal and the pulse signal.

FIG. 11A is a diagram illustrating a waveform of the sine signal, and FIG. 11B is a diagram illustrating a waveform of the pulse signal. Out of the above, the waveform of the sine signal defines a waveform of time-variation of the ultrasonic standing wave in the ultrasonic wave spatial light modulator 3 (specifically, a waveform of time-variation of refractive index of each of the antinodes a and b), and the waveform of the pulse signal defines a waveform of time-variation of an amount of phase modulation applied to the 0th-order diffracted light by the optical phase modulator 5C.

According to the pulse signal, it is possible to set the amount of phase modulation of the 0th-order diffracted light to 0 in one of the aforementioned anterior half period and last half period, and to set the amount of phase modulation of the 0th-order diffracted light to π in the other of the aforementioned anterior half period and last half period. In this case, it is possible to prevent the patterns at respective time points of the three-beam structured illumination from cancelling each other, resulting in that the contrast of the image of the three-beam structured illumination can be maximized.

Hereinafter, the reason why the mutual cancellation of the patterns can be prevented, will be described in detail. For convenience of explanation, it is assumed that the amount of phase modulation of the 0th-order diffracted light becomes π in the anterior half period, and it becomes 0 in the last half period.

First, a pattern of the three-beam structured illumination (phase distribution of the three-beam structured illumination) when the phase modulation of the 0th-order diffracted light is not conducted (when the modulating function of the optical phase modulator 5C is turned off) is considered.

In this case, the pattern of the three-beam structured illumination is reversed between the anterior half period and the last half period as illustrated in FIG. 9(B), so that if the pattern in the anterior half period is represented by the following expression (1), the pattern in the last half period is represented by the following expression (2). Ii(r)=I ₀+2I+4·√I ₀ ·√I·cos(k _(z) X)·cos(k _(z) Z)+2·I·cos(2k _(x) X)  (1) Ii(r)=I ₀+2I+4·√I ₀ ·√I·cos(k _(x) X−π)·cos(k _(z) Z)+2·I·cos(2k _(x) X−2π)  (2)

Note that X indicates a position of direction corresponding to a pitch direction of the phase type diffraction grating in the three-beam structured illumination, Z indicates a position of the optical axis direction of the three-beam structured illumination, I₀ indicates an intensity of the 0th-order diffracted light, I indicates an intensity of the ± first-order diffracted lights, and k indicates a wave number. In each of the expressions (1) and (2), a first term indicates an intensity of the 0th-order diffracted light, a second term indicates a sum of an intensity of the + first-order diffracted light and an intensity of the − first-order diffracted light, a third term indicates an interference intensity distribution between the ±first-order diffracted lights and the 0th-order diffracted light, and a fourth term indicates an interference intensity distribution of the mutual ± first-order diffracted lights. Only the third term is different between the expression (1) and the expression (2).

Next, a pattern of the three-beam structured illumination when the phase modulation of the 0th-order diffracted light is conducted (when the modulating function of the optical phase modulator 5C is turned on) is considered.

In the three-beam structured illumination of this case, since the phase modulation is performed on the 0th-order diffracted light in a modulation width π, the phase of the 0th-order diffracted light is shifted by it in the anterior half period, and thus the pattern in the anterior half period becomes one as represented by an expression (1′), and the pattern in the last half period is the same pattern as represented by the expression (2). Ii(r)=I ₀+2I+4·√I ₀ ·√I·cos(k _(z) Xπ)·cos(k _(z) Z)+2·I·cos(2k _(x) X)  (1′)

Specifically, the three-beam structured illumination when the phase modulation of the 0th-order diffracted light is conducted, takes the pattern of the expression (1′) in the anterior half period, and takes the pattern of the expression (2) in the last half period. When this expression (1′) is compared with the expression (2), it can be understood that the both patterns are mutually the same.

Accordingly, when the phase modulation of the 0th-order diffracted light is conducted, the mutual cancellation of the patterns can be prevented.

Note that here, the timing at which the phase of the 0th-order diffracted light is shifted is set only to the anterior half period, but, it goes without saying that a similar effect can be achieved also when the timing is set only to the last half period.

Now, in advance of the three-dimensional mode, the controlling device 19 continuously drives each of the coherent light source 1, the imaging device 12, and the phase adjusting circuit 19D in a state where a uniform test specimen, in place of the specimen 10, is disposed in the present system, changes an amount of phase modulation of the light intensity modulator 30 while referring to a contrast of an image output from the imaging device 12, and fixes the amount of phase modulation at a time point at which the contrast becomes maximum (or at a time point at which the contrast reaches a value equal to or greater than a threshold value).

FIG. 12 are diagrams each comparing a waveform of time-variation of the refractive index of an antinode a of the ultrasonic standing wave and a waveform of time-variation of an amount of phase modulation of the 0th-order diffracted light. In FIG. 12, the waveform of time-variation of the refractive index of the antinode a is indicated by a solid line, and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light is indicated by a dotted line.

As illustrated in FIG. 12A, when a phase difference ΔΨ between the waveform of time-variation of the refractive index of the antinode a and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light coincides with a product of π/2 multiplied by an even number, the period of time during which the phase of the 0th-order diffracted light is shifted coincides with either the anterior half period or the last half period of the refractive index variation, so that the contrast of the image of the three-beam structured illumination becomes maximum.

Further, as illustrated in FIG. 12B, even if the phase difference ΔΨ between the waveform of time-variation of the refractive index of the antinode a and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light does not coincide with the product of π/2 multiplied by an even number, the image of the three-beam structured illumination has a contrast, as long as the phase difference ΔΨ does not coincide with a product of π/2 multiplied by an odd number.

However, as illustrated in FIG. 12C, when the phase difference ΔΨ between the waveform of time-variation of the refractive index of the antinode a and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light coincides with the product of π/2 multiplied by an odd number, the contrast of the image of the three-beam structured illumination becomes zero.

Therefore, in the three-dimensional mode, the phase difference ΔΨ between the waveform of time-variation of the refractive index of the antinode a and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light is set to a product other than the product of π/2 multiplied by an odd number, and is desirably set to the product of π/2 multiplied by an even number.

Note that although the description is made here by focusing attention on the refractive index of the antinode a, the waveform of time-variation of the refractive index of the antinode b corresponds to the waveform of time-variation of the refractive index of the antinode a in which the phase is made to be opposite, so that the same also applies to a case where attention is focused on the refractive index of the antinode b.

Further, similar to the controlling device in the two-dimensional mode (refer to FIG. 6), the controlling device in the three-dimensional mode switches a connection destination of the selector switch 19A-2, to thereby switch a direction of the three-beam structured illumination among a first direction, a second direction, and a third direction.

Further, similar to the controlling device in the two-dimensional mode (refer to FIG. 6), the controlling device in the three-dimensional mode repeatedly obtains pieces of image data while shifting the phase of the three-beam structured illumination in respective cases where the direction of the three-beam structured illumination is the first direction, the second direction, and the third direction.

Note that in the three-dimensional mode, at least five pieces of image data with different phases of the three-beam structured illumination are required for the separating calculation for separated information of specimen (incidentally, it is sufficient if there are provided at least three pieces of image data in the two-dimensional mode).

For this reason, it is desirable that the controlling device in the three-dimensional mode sets the amount of phase shift per one step in the three-beam structured illumination to 2π/5, for example.

In that case, it is only required to set a distance D from a center of spot (effective diameter) S of light which is incident on the ultrasonic wave propagation path R to one end of the ultrasonic wave propagation path R, to one-fifth a length L in a propagation direction of the ultrasonic wave propagation path R (D=L/5).

Further, the controlling device in the three-dimensional mode obtains five pieces of image data having amounts of phase shift which are different by 2π/5, with respect to the respective directions, and sends the five pieces of image data regarding the first direction, the five pieces of image data regarding the second direction, and the five pieces of image data regarding the third direction to the image storage/processing unit 13.

Further, the image storage/processing unit 13 in the three-dimensional mode obtains demodulated image data along the first direction and the optical axis direction from the five pieces of image data regarding the first direction, obtains demodulated image data along the second direction and the optical axis direction from the five pieces of image data regarding the second direction, and obtains demodulated image data along the third direction and the optical axis direction from the five pieces of image data regarding the third direction. After that, the image storage/processing unit 13 combines the three pieces of demodulated image data on a wave number space, then returns the resultant to the real space again to obtain image data of super-resolved image along the first direction, the second direction, the third direction, and the optical axis direction, and sends the image data to the image display device 14. The super-resolved image corresponds to a super-resolved image along the three directions in the in-plane of the specimen 10 and the optical axis direction of the specimen 10 (three-dimensional super-resolved image) (the above is the explanation of the three-dimensional mode). For the concrete calculation, a method disclosed in U.S. Pat. No. 8,115,806, for example, can be employed.

As described above, in the present system, the length L of the ultrasonic wave propagation path R, the diameter φ of the spot S, and the distance D from one end of the ultrasonic wave propagation path R to the center of the spot S, are set to satisfy the optimum relation described above, so that the phase of the two-beam structured illumination or the three-beam structured illumination can be switched only by electrically switching the frequency of AC voltage given to the ultrasonic wave spatial light modulator 3. A period of time required for the switching is short, and can be reduced to 10 ms or less even including a time constant of the circuit system including the power source.

Therefore, a period of time for obtaining the required number of image data in the present system can be particularly reduced to a short period of time, compared to a case that the optical element or the specimen 10 is mechanically moved for switching the phase of the two-beam structured illumination or the three-beam structured illumination.

Further, in the present system, there is no need to mechanically move the optical element or the specimen 10 for switching the phase of the two-beam structured illumination or the three-beam structured illumination, so that the configuration of the periphery of the optical system can be simplified.

Further, in the present system, the three ultrasonic wave propagation paths Ra, Rb, and Rc with different angles are formed in one acousto-optical medium 15, so that the direction of the two-beam structured illumination or the three-beam structured illumination can be switched only by electrically changing the connection state of the selector switch 19A-2. A period of time required for the switching is short, and can be reduced to 10 ms or less even including a time constant of the circuit system including the power source.

Therefore, the present system can particularly reduce the period of time for obtaining the required number of image data, compared to a case which the optical element or the specimen 10 is mechanically rotated for switching the direction of the two-beam structured illumination or the three-beam structured illumination.

Further, in the present system, since the switching can be made between the two-dimensional mode and the three-dimensional mode, it is possible to generate both of the two-dimensional super-resolved image and the three-dimensional super-resolved image from the same specimen 10.

Further, in the three-dimensional mode of the present system, since the ultrasonic wave spatial light modulator is used as the phase type diffraction grating for generating the three-beam structured illumination, there is a possibility that the contrast of the image of the three-beam structured illumination becomes zero (a possibility that the imaging cannot be realized). However, the optical phase modulator 5C is used and the phase of the 0th-order diffracted light is modulated by the pulse signal whose frequency is the same as that of the sine signal, so that such a problem (problem regarding the reduction in contrast) can be avoided.

[Supplement Regarding Control of Contrast of Image]

Further, in the three-dimensional mode of the present system, the adjustment of phase difference ΔΨ between the waveform of time-variation of the refractive index and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light is automatically conducted by the controlling device 19, but, the adjustment may also be conducted manually by a user of the system. However, in that case, it is required that the controlling device 19 displays, in real time, an image output by the imaging device 12, to the image display device 14, so that the user can check the contrast of image which is under adjustment.

Further, in the three-dimensional mode of the present system, the frequency of the pulse signal is made to coincide with the frequency of the sine signal, but, there is no problem if the frequency of the pulse signal does not coincide with the frequency of the sine signal as long as the pulse signal is synchronized with the sine signal.

For example, it is also possible that the frequency of the pulse signal is set to 1/N times the frequency of the sine signal (N is an integer of 1 or more), and the duty ratio (ON period/pulse period) of the pulse signal is set to 1/(2N). FIG. 13 illustrate an example of case where it is set that N=3, in which FIG. 13(A) illustrates a waveform of time-variation of the refractive index of the antinode a in FIG. 7 of the ultrasonic standing wave under the setting of N=3, and FIG. 13(B) illustrates a waveform of time-variation of the phase of the 0th-order diffracted light under the setting of N=3.

In this case, although the phase of the 0th-order diffracted light is shifted only once every three pitches (3T) of the refractive index variation, the length of the period of time during which the phase of the 0th-order diffracted light is shifted corresponds to a length of half pitch (T/2) of the refractive index variation, so that by adjusting the phase difference ΔΨ between the waveform of time-variation of the refractive index and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light to an appropriate value, and making the period of time during which the phase of the 0th-order diffracted light is shifted coincide with only either the anterior half period or the last half period of the refractive index variation as illustrated in FIG. 13(A) and FIG. 13(B), the contrast of image can be increased.

Note that when N is set to 2 or more, the period of time in which the contrast of image is increased becomes, not continuous, but intermittent period of time (the period of time in which the contrast of image is increased appears only intermittently), so that it is also possible to limit the charge storage period of the imaging device 12 only to the period of time in which the contrast of image is increased, by making a driving signal of the imaging device 12 (a signal of regulating an opening/closing timing of electronic shutter) to be synchronized with the aforementioned sine signal.

In this case, the charge storage period may be set to a period of time (T) as a result of combining a period of time during which the phase of the 0th-order diffracted light is shifted (T/2) and a similar period of time before or after the period of time (T/2), out of a phase-modulation pitch (N×T), as illustrated in FIG. 13(C), for example.

Note that here, although the duty ratio (ON period/pulse period) of the pulse signal is set to coincide with 1/(2N), if the contrast of image may be lowered to some degree, the duty ratio does not always have to perfectly coincide with 1/(2N), and it may be set to less than 1/(2N).

Incidentally, when the duty ratio is set to less than 1/(2N), the length of period of time during which the phase of the 0th-order diffracted light is shifted becomes shorter than the length of half pitch (T/2) of the refractive index variation, so that it is desirable to adjust the phase difference ΔΨ between the waveform of time-variation of the refractive index and the waveform of time-variation of the amount of phase modulation of the 0th-order diffracted light to an appropriate value to make a timing at which the phase of the 0th-order diffracted light is shifted coincide with a timing at which the refractive index indicates a peak or a valley.

Further, in the three-dimensional mode of the present system, the waveform of time-modulation of the phase of the 0th-order diffracted light is set to the pulse waveform, and the phase of the 0th-order diffracted light is shifted (the phase is switched) rapidly between 0 and π, but, a certain effect can be achieved only by setting the waveform of time-modulation to a sinusoidal waveform and gently shifting the phase between 0 and it.

Further, in the three-dimensional mode of the present system, the waveform of time-variation of the phase of the 0th-order diffracted light is set to the pulse waveform or the sinusoidal waveform, but, it is also possible to employ another waveform as long as the phase of the 0th-order diffracted light is time-modulated.

Further, in the three-dimensional mode of the present system, the position at which the mask 5A is inserted is set to the pupil conjugate plane of the light path from the ultrasonic wave spatial light modulator 3 to the fluorescence filter 8 b, but, the position may also be deviated to some degree from the pupil conjugate plane. However, when the position is close to the pupil conjugate plane, an interval between the incident position of the 0th-order diffracted light and the incident position of the ± first-order diffracted lights is increased, so that there is an advantage that the degree of freedom of layout of the optical phase modulator 5C and the corrective block 5C′ is increased.

Further, in the three-dimensional mode of the present system, the target of phase modulation is set to the 0th-order diffracted light, but, it may also be set to the ± first-order diffracted lights. FIG. 14 illustrates an example of phase modulation pattern when the target of phase modulation is the 0th-order diffracted light, and meanwhile, FIG. 15 illustrates an example of phase modulation pattern when the target of phase modulation is the ±first-order diffracted lights.

Further, when the target of phase modulation is set to the ± first-order diffracted lights, a position at which the optical phase modulator 5C is disposed corresponds to each of areas on which the ± first-order diffracted lights are incident (two areas symmetric to each other with respect to the optical axis), and a position at which the corrective block 5C′ is disposed corresponds to an area on which the 0th-order diffracted light is incident (area in the vicinity of the optical axis), as illustrated in FIG. 16(A). Note that in that case, a shutter for opening/closing the light path of the 0th-order diffracted light is additionally required.

Further, when the target of phase modulation is set to the ± first-order diffracted lights, in order to deal with the switching of branching direction of diffracted light, it is only required that the entire mask 5A is set to be able to rotate around the optical axis as indicated by an arrow mark in FIG. 16(A), or the position at which the optical phase modulator 5C is disposed is set to the entire area on which the ± first-order diffracted lights may be incident, as illustrated in FIG. 16(B), for example (note that FIG. 16(A) and FIG. 16(B) are schematic diagrams, and an illustration of electrode, wiring, and the like is omitted).

Further, in the three-dimensional mode of the present system, the target of phase modulation is set to either the ± first-order diffracted lights or the 0th-order diffracted light for modulating the phase difference between the ± first-order diffracted lights and the 0th-order diffracted light, but, it goes without saying that the target can be set to both of the ± first-order diffracted lights and the 0th-order diffracted light. In that case, it is only required to individually dispose the optical phase modulator 5C in both of the area on which the ± first-order diffracted lights may be incident and the area on which the 0th-order diffracted light may be incident.

Note that in the present system, the optical phase modulator 5C is used for modulating the phase of the diffracted light, but, the present invention is not limited to this. For example, the use of refractive member with different thicknesses, instead of the optical phase modulator 5C, is also within expectations, and as the refractive member with different thicknesses, a wedge-shaped or stepped glass member or the like can be cited. It is also possible that the wedge-shaped or stepped glass member is disposed in the area on which the 0th-order diffracted light is incident and the glass member is moved in a predetermined direction, or the glass member is rotated around a predetermined axis to periodically change the thickness of the glass member through which the 0th-order diffracted light passes, to thereby modulate the phase of the diffracted light that passes through the glass member.

[Supplement Regarding Phase Shift of Structured Illumination]

Note that in the two-dimensional mode of the present system, the change pattern of frequency of the AC voltage given to the transducer is set to a pattern in which the number of wave of the ultrasonic standing wave is changed by ½, and the distance D from the center of the spot (effective diameter) S to one end of the ultrasonic wave propagation path is set to one-third the length L in the propagation direction of the ultrasonic wave propagation path R (D=L/3) in order to set the phase shift pitch of the two-beam structured illumination in each of the first direction, the second direction and the third direction to 2π/3, but, the present invention is not limited to this.

Concretely, the ultrasonic wave propagation path is only required to satisfy the following conditions.

First, the change pattern of frequency of the AC voltage given to the transducer is only required to be a pattern in which the number of wave of the ultrasonic standing wave is changed by M/2 (where |M| is an integer of 1 or more).

In that case, in order to set the phase shift pitch of the two-beam structured illumination to an arbitrary value Δψ, the distance D from one end of the ultrasonic wave propagation path to the center of the spot S, and the total length L of the ultrasonic wave propagation path are only required to satisfy a relation of D:L=Δψ/M:2π.

Incidentally, if it is set that M=1, the number of ultrasonic standing wave is changed only by ½, so that the deviation occurred, due to the change, in the number of fringe of the two-beam structured illumination can be minimized.

Further, when the number of image data used for the separating calculation is k, if it is set that Δψ=2π/k, it is possible to securely obtain the required image data. Note that it is preferable that |k| is an integer of 3 or more.

Further, in the three-dimensional mode of the present system, the change pattern of frequency of the AC voltage given to the transducer is set to a pattern in which the number of wave of the ultrasonic standing wave is changed by ½, and the distance D from the center of the spot (effective diameter) S to one end of the ultrasonic wave propagation path is set to one-fifth the length L in the propagation direction of the ultrasonic wave propagation path R (D=L/5) in order to set the phase shift pitch of the three-beam structured illumination in each of the first direction, the second direction, and the third direction to 2π/5, but, the present invention is not limited to this.

Concretely, the ultrasonic wave propagation path is only required to satisfy the following conditions.

First, the change pattern of frequency of the AC voltage given to the transducer is only required to be a pattern in which the number of wave of the ultrasonic standing wave is changed by M/2 (where |M| is an integer of 1 or more).

In that case, in order to set the phase shift pitch of the three-beam structured illumination to an arbitrary value Δψ, the distance D from one end of the ultrasonic wave propagation path to the center of the spot S, and the total length L of the ultrasonic wave propagation path are only required to satisfy a relation of D:L=Δψ/M:2π.

Note that a passing area of exit light flux (spot) on the ultrasonic wave propagation path R of the ultrasonic wave spatial light modulator 3 does not always have to be limited to a partial area separated from both ends of the ultrasonic wave propagation path R, for forming the interference fringes on the specimen plane, and when, for example, the light flux passed through the ultrasonic wave propagation path R is narrowed by the field stop 5B, the passing area of effective exit light flux on the ultrasonic wave propagation path R, namely, the partial area on the ultrasonic wave propagation path R through which the exit light flux that contributes to the interference fringes (structured illumination S′) formed on the illuminated area (observational area, field area) on the specimen plane passes, is only required to satisfy the relation of D:L=Δψ/M:2π.

Incidentally, if it is set that M=1, the number of ultrasonic standing wave is changed only by ½, so that the deviation occurred, due to the change, in the number of fringe of the three-beam structured illumination can be minimized.

Further, when the number of image data used for the separating calculation is k, if it is set that Δψ=2π/k, it is possible to securely obtain the required image data. Note that it is preferable that |k| is an integer of 5 or more.

Further, in the above explanation, the position of spot in the ultrasonic wave spatial light modulator 3 is made to be different between the two-dimensional mode and the three-dimensional mode, and in this case, there is generated a necessity of moving the position of the ultrasonic wave spatial light modulator 3 before and after the switching of mode.

Accordingly, in the present system, it is preferable to previously set a switching pattern of the sine signal described above to enable the number of wave of the ultrasonic standing wave to be changed by ½, and to previously adjust the positional relationship between the spot S and the ultrasonic wave spatial light modulator 3 so that the distance D from one end of the ultrasonic wave propagation path to the center of the spot S satisfies D:L=1:6.

In this case, in the two-dimensional mode, by changing the number of wave of the ultrasonic standing wave by ½, it is possible to set the phase shift pitch of the two-beam structured illumination to “2π/3”.

Further, in this case, in the three-dimensional mode, by changing the number of wave of the ultrasonic standing wave by 1, it is possible to set the phase shift pitch of the three-beam structured illumination to “π/3”.

FIG. 17 illustrates a relation between the number of wave of the ultrasonic standing wave and the amount of phase shift when it is set that D:L=1:6.

Therefore, it is only required that the image storage/processing unit 13 in the two-dimensional mode uses three pieces of image data obtained in each of three states indicated by reference letters a, c, and e in FIG. 17 for the above-described separating calculation.

Meanwhile, the image storage/processing unit 13 in the three-dimensional mode is only required to use six pieces of image data obtained in each of six states indicated by reference letters a to f in FIG. 17 for the above-described separating calculation.

Specifically, in the present system, only by previously adjusting the positional relationship between the spot S and the ultrasonic wave spatial light modulator 3 to the relationship suitable for both of the two-dimensional mode and the three-dimensional mode, it is possible to omit the movement of the ultrasonic wave spatial light modulator 3 before and after the switching of mode.

Further, in the acousto-optical medium 15 of the present system, the three ultrasonic wave propagation paths Ra, Rb, and Rc are disposed in an asymmetric relation relative to the center of the spot S (refer to FIG. 4), but, they may also be disposed in a symmetric relation as illustrated in FIG. 18, for example. Incidentally, an advantage of the example illustrated in FIG. 4 is that projections and depressions of the outer shape of the acousto-optical medium 15 are small, and an advantage of the example illustrated in FIG. 18 is that environments of the three ultrasonic wave propagation paths Ra, Rb, and Rc completely coincide with one another.

Further, in the present system, the lengths of the ultrasonic wave propagation paths Ra, Rb, and Rc are set to common, and change patterns of frequency of the AC voltage given to the transducers 18 a, 18 b, and 18 c are set to common, but, it is also possible to set that the respective lengths and change patterns are not common. However, also in that case, the respective ultrasonic wave propagation paths Ra, Rb, and Rc are set to satisfy the above-described conditions.

Further, in the explanation of the present embodiment, it is explained that the number of wave of the ultrasonic standing wave (namely, the wavelength of the ultrasonic standing wave) generated in the ultrasonic wave propagation paths Ra, Rb, and Rc, is changed in the predetermined pattern for shifting the phase of the interference fringes formed of the diffracted lights, and the frequency of AC voltage given to the transducers 18 a, 18 b, and 18 c of the ultrasonic wave spatial light modulator 3 is changed, as one method of changing the wavelength of the ultrasonic standing wave, but, it goes without saying that the present invention is not limited to this method.

For example, when the optical phase modulator 5C is individually disposed in each of the incident area of the + first-order diffracted light and the incident area of the − first-order diffracted light on the mask 5A for modulating the phase difference between the ± first-order diffracted lights and the 0th-order diffracted light in the three-dimensional mode (for example, when the optical phase modulators 5C and the corrective block 5C′ are disposed as illustrated in FIG. 19), it is also possible to design as follows.

First, in the two-dimensional mode, the 0th-order diffracted light is blocked, a phase offset α is given to the + first-order diffracted light, and a phase offset −α is given to the − first-order diffracted light (specifically, the phase offset of the + first-order diffracted light with respect to the 0th-order diffracted light and the phase offset of the − first-order diffracted light with respect to the 0th-order diffracted light are set to equivalent with opposite signs). Also in this state, it is possible to generate appropriate two-beam structured illumination. Further, when switching the phase of the two-beam structured illumination, the phase offset amount α is switched in a predetermined pattern, instead of switching the wavelength of the aforementioned ultrasonic standing wave in the predetermined pattern. For example, if the phase offset amount α is switched in three ways in a pitch of 2π/3, the phase of the two-beam structured illumination can be switched in three ways in a pitch of 2π/3.

Meanwhile, in the three-dimensional mode, the 0th-order diffracted light is transmitted, the phase offset α is given to the + first-order diffracted light, the phase offset −α is given to the − first-order diffracted light, and from that state, the aforementioned modulation is conducted. Also in this state, it is possible to generate appropriate three-beam structured illumination (FIG. 20 is a diagram illustrating a phase modulation pattern in this case). Further, when switching the phase of the three-beam structured illumination, the phase offset amount α is switched in a predetermined pattern, instead of switching the wavelength of the aforementioned ultrasonic standing wave in the predetermined pattern. For example, if the phase offset amount α is switched in five ways in a pitch of 2π/5, the phase of the three-beam structured illumination can be switched in five ways in a pitch of 2π/5.

Note that here, the variation pitch of the phase offset amount α in the two-dimensional mode and the variation pitch of the phase offset amount α in the three-dimensional mode are individually set, but, they may also be set in a common manner, Specifically, it is also possible that the system is previously configured so that the phase offset amount α can be switched by 2π/6, in which three pieces of image data obtained in each of three states where the phase offset amounts α are 0, 2(2π)/6, and 4(2π)/6, are used for the above-described separating calculation in the two-dimensional mode, and six pieces of image data obtained in each of six states where the phase offset amounts α are 0, (2π)/6, 2(2π)/6, 3(2π)/6, 4(2π)/6, and 5(2π)/6, are used for the above-described separating calculation in the three-dimensional mode.

Further, in the above-described embodiment, as the diffracted lights for forming the interference fringes (two-beam interference fringes, three-beam interference fringes), a combination of ± first-order diffracted lights and 0th-order diffracted light is employed, but, another combination may also be employed. In order to form the three-beam interference fringes, it is only required to generate three-beam interference caused by three diffracted lights in which an interval of orders of diffraction is equal, so that a combination of 0th-order diffracted light, first-order diffracted light, and second-order diffracted light, a combination of ±second-order diffracted lights and 0th-order diffracted light, a combination of ±third-order diffracted lights and 0th-order diffracted light, and the like can be employed.

Note that all documents hereinbelow disclosed in the present specification are incorporated by reference.

1) U.S. Pat. No. 6,239,909

2) U.S. Pat. No. 8,115,806

3) Mats G. L. Gustafsson et al., “Doubling the lateral resolution of wide-field fluorescence microscopy using structured illumination”, Proceedings of the SPIE—The international Society for Optical Engineering, Vol. 3919, pp. 141-150, 2000

The many features and advantages of the embodiments are apparent from the detailed specification and, thus, it is intended by the appended claims to cover all such features and advantages of the embodiments that fall within the true spirit and scope thereof. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the inventive embodiments to the exact construction and operation illustrated and described, and accordingly all suitable modifications and equivalents may be restored to, falling within the scope thereof. 

What is claimed is:
 1. A structured illumination apparatus, comprising: a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; an illuminating optical system making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and a controlling unit controlling a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.
 2. The structured illumination apparatus according to claim 1, wherein the controlling unit controls the phase in order for a phase difference between at least two diffracted lights among the diffracted lights to be π on the observational object.
 3. The structured illumination apparatus according to claim 1, wherein the controlling unit modulates the phase of the diffracted light by a modulating signal.
 4. The structured illumination apparatus according to claim 3, wherein the controlling unit sets a frequency of the modulating signal to the frequency which is 1/N times a frequency of the driving signal and sets a duty ratio of the modulating signal to 1/(2N) or less (where N is an integer of 1 or more).
 5. The structured illumination apparatus according to claim 3, wherein the controlling unit includes a phase modulator being disposed in a light path of at least one diffracted light among the diffracted lights, and a driving part driving the phase modulator by the modulating signal.
 6. The structured illumination apparatus according to claim 1, wherein the diffracted lights are an 0th-order diffracted light and ±first-order diffracted lights.
 7. The structured illumination apparatus according to claim 6, further comprising: an offset unit offsetting a phase of the +first-order diffracted light relative to the 0th-order diffracted light by an offset amount αand offsetting a phase of the −first-order diffracted light relative to the 0th-order diffracted light by an offset amount −α, wherein the controlling unit controls a contrast of the interference fringes by performing the controlling from a state where the phases of the ±first-order diffracted lights are offset, and switch a phase of the interference fringes by switching the offset amount α in a predetermined pattern.
 8. The structured illumination apparatus according to claim 1, wherein: the interference fringes are formed of the exit light flux being passed through a predetermined partial area separated from both ends of the sonic wave propagation path; and the driving unit switches a phase of the interference fringes by switching a wavelength of the sonic standing wave in a predetermined pattern.
 9. The structured illumination apparatus according to claim 8, wherein: the driving unit is capable of changing the wavelength of the sonic standing wave in a pattern in which a total number of wave of the sonic standing wave is changed by M/2 (where |M| is an integer of 1 or more); and when a phase shift pitch of the interference fringes is set to ΔΨ, a distance D from either end portion of the sonic wave propagation path to the partial area and a total length L of the sonic wave propagation path satisfy a relation of D:L=ΔΨ/M:2π.
 10. The structured illumination apparatus according to claim 8, wherein the driving unit switches the wavelength of the sonic standing wave by switching a frequency of the driving signal given to the light modulator in a predetermined pattern.
 11. The structured illumination apparatus according to claim 1, further comprising: a switching unit switching a mode of the structured illumination apparatus between a three-dimensional mode in which three diffracted lights of the exit light flux are reflected on the interference fringes and a two-dimensional mode in which only two diffracted lights of the exit light flux are reflected on the interference fringes.
 12. The structured illumination apparatus according to claim 11, wherein: the interference fringes are formed of the exit light flux being passed through a predetermined partial area separated from both ends of the sonic wave propagation path; the driving unit switches a phase of the interference fringes by switching a wavelength of the sonic standing wave in a predetermined pattern; and a distance D from either end portion of the sonic wave propagation path to the partial area and a total length L of the sonic wave propagation path satisfy a relation of D:L=1:6.
 13. The structured illumination apparatus according to claim 1, wherein the light modulator has a plurality of the sonic wave propagation paths which intersect at a passing area of the exit light flux, and a direction of the sonic standing wave is capable of switching by switching an effective sonic wave propagation path among the sonic wave propagation paths.
 14. A structured illumination microscopy, comprising: the structured illumination apparatus according to claim 1; and an image processing unit making a super-resolved image of an observational object using images being obtained by a detector that detects an observational light from the observational object illuminated by the structured illumination apparatus under a plurality of states in which patterns of the sonic standing wave are different.
 15. A structured illumination method, comprising: preparing a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and controlling a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.
 16. A structured illumination apparatus, comprising: a light modulator disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a controlling device configured to generate a sonic standing wave in the sonic wave propagation path by outputting a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; and an illuminating optical system configured to interfere at least three diffracted lights with each other and configured to form interference fringes of the diffracted lights on an observational object, in which the at least three diffracted lights are the exit light flux passed through the sonic wave propagation path; wherein the controlling device is configured to control a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.
 17. The structured illumination apparatus according to claim 16, wherein the controlling device controls the phase in order for a phase difference between at least two diffracted lights among the diffracted lights to be π on the observational object.
 18. The structured illumination apparatus according to claim 16, further comprising: an optical phase modulator configured to modulate the phase of the diffracted light in response to a modulating signal.
 19. The structured illumination apparatus according to claim 18, wherein: the optical phase modulator is disposed in a light path of at least one diffracted light among the diffracted lights, and the controlling device is configured to drive the optical phase modulator by outputting the modulating signal to the optical phase modulator. 